| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve performance, without having to set the manufacturing precision so high, and moreover to control rotation around Z-axis with high accuracy. SOLUTION: One side guide rail 110, having a first guide surface 110A in Y-axis direction, a Y-slider 120 having a second guide surface 120 in X-axis direction and an X-slider 130 are provided. The Y-slider is made by laying the Y-slider body 220, having the second guide surface 120A, on an elastic hinge plate 200 forming a parallel link mechanism and is restricted to be movable in Y-axis direction to the first guide surface 110A with the first link 201 of the elastic hinge plate 200. A second link 202 is made a free end. The first link 201 and the second link 202 of the Y-slider 120 are position-controlled independently with the first and second Y-axis linear motors 141 and 142 and the first and the second Y-axis linear encoders 143 and 144, and rotationθz of the Y-slider 120 about Z-axis is controlled extensively.</p> |
