| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable the detection of a malfunction or a search for a failure cause to be carried out rapidly and correctly. SOLUTION: This pressure swing adsorption-type gas generating device is equipped with two adsorption vessels 1 and 2 filled with an adsorbent, a product vessel 3, adsorption valves SV1 and SV2 and exhaust valves SV3 and SV4 for switching a flow path to introduce a feedstock air into the adsorption vessels 1 and 2, an equalizing valve SV5 and outlet valves SV6 and SV7. An adsorbing action which supplies the compressed feedstock air to perform an adsorption process and a desorbing action which desorbs a gas under a low pressure, are alternately carried out in the two adsorption vessels 1 and 2 by switching each of the valves. The feedstock air and the internal pressures of the adsorption vessels 1 and 2 and the product vessel 3 are detected by pressure detectors 11, 12, 13 and 14 respectively. Further, an operating abnormality is detected with the help of pressure values and a drive signal for opening and closing each of the valves, according to search procedures composed based on a reference value set to each of pressure values.</p> |
