APPARATUS FOR MANUFACTURING COLOR FILTER, METHOD OF MANUFACTURING COLOR FILTER, REDUCED PRESSURE HEATING DEVICE, REDUCED PRESSURE HEATING METHOD, APPARATUS FOR MANUFACTURING DISPLAY DEVICE AND METHOD MANUFACTURING OF DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and method of manufacturing a color filter, by which generation of defects in a film plane or a film thickness profile of a color layer can be suppressed to improve the yield when heat-drying is carried out in a reduced pressure environment.

SOLUTION: The manufacturing apparatus 1 for a color filter includes a reduced pressure heating device 8. The reduced pressure heating device 8 includes a pressure reducing section 9 and a heating section 10. The manufacturing apparatus 1 for a color filter heats a substrate 3 in a reduced pressure environment to vaporize a solvent component (water content, a solvent component and a binder) included in a color layer of the substrate 3. By heating and drying in a reduced pressure environment, the drying time can be reduced and a color layer with uniform film thickness can be obtained. By carrying out pressure reduction and heating under predetermined pressure reduction conditions (such as a reduced pressure value and retention time of the reduced pressure) and predetermined temperature conditions (such as a substrate temperature, heating temperature and heating time), generation of defects and abnormal film thickness in a color layer can be suppressed to improve the yield.

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