发明名称 APPARATUS AND METHOD FOR MANUFACTURING SOLAR CELL PANEL
摘要 Disclosed are an apparatus and a method for manufacturing a solar cell panel. The solar panel manufacturing apparatus comprises a support table in which plural air jet ports are formed to lift up a loaded substrate, a laser processing unit which is placed in the upper portion of the support table and irradiates the laser on the substrate, and a suction unit which is placed in the lower portion of the support table and collects the particles generated from the substrate by the laser. The solar panel manufacturing apparatus lifts the solar cell panel up to the support table in order to load and transfer it so that scratches on or damage to the deposited layer may be prevented beforehand by preventing physical contact between the substrate and table. Since the solar panel manufacturing apparatus loads the substrate with the deposited layer facing downward and irradiates the laser on the top thereof and suctions the particles on the bottom thereof, short circuits between patterns do not occur and yield rate can be increased, as a result of efficient removal of the particles caused by laser etching.
申请公布号 WO2010011088(A2) 申请公布日期 2010.01.28
申请号 WO2009KR04090 申请日期 2009.07.23
申请人 MEERECOMPANY;BACK, KWANG SOO;KANG, HYUN GU;LEE, BYUNG GUK;KIM, BYUNG KYEOM 发明人 BACK, KWANG SOO;KANG, HYUN GU;LEE, BYUNG GUK;KIM, BYUNG KYEOM
分类号 H01L31/042 主分类号 H01L31/042
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