Method of producing electromechanical transducer element, electromechanical transducer element, liquid droplet discharge head, and image forming apparatus

摘要

A method of producing an electromechanical transducer element includes forming a first, common electrode on one of a substrate and an undercoat layer; forming an electromechanical transducer film on the first electrode; forming a second electrode on the electromechanical transducer film; forming a first protective film on an upper surface of the second electrode, the electromechanical transducer film, and a side wall of the second electrode, and selectively forming a second protective film on a portion of the first protective film protecting the electromechanical transducer film and the side wall of the second electrode.

主权项

1. A method of producing an electromechanical transducer element, the method comprising:
forming a first electrode on one of a substrate and an undercoat layer; forming an electromechanical transducer film on the first electrode; forming a second electrode on the electromechanical transducer film; forming a first protective film including:
a first upper portion on an upper surface of the second electrode,a side-wall portion on a side of the electromechanical transducer film, anda second upper portion on an upper surface of the electromechanical transducer film and on a side of the second electrode, and forming a second protective film so that an entire length of the second protective film is along a plane that is parallel to the side-wall portion of the first protective film.