发明名称 ACCELERATION SENSOR AND VIBRATION MONITORING SYSTEM
摘要 An acceleration sensor according to the present invention comprises a fixed part having an accommodation space, a movable part that is accommodated in the accommodation space and is capable of movement relative to the fixed part, a detection unit that detects a physical quantity correlated with the amount of movement of the movable part relative to the fixed part, and a damping generation body comprising a non-compressed viscous fluid filling the accommodation space. This structure enables the measurement of lower rates of acceleration and the miniaturization of the acceleration sensor.
申请公布号 WO2016088468(A1) 申请公布日期 2016.06.09
申请号 WO2015JP79965 申请日期 2015.10.23
申请人 ROHM CO., LTD. 发明人 NAIKI TAKASHI
分类号 G01P15/08;B81B3/00;G01H17/00;G01P15/12;G01P15/125;G01P15/18;G08C17/00;G08C19/00;H01L29/84 主分类号 G01P15/08
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