| 摘要 |
PROBLEM TO BE SOLVED: To precisely determine the quality of an object image while preventing increase of dimension in feature quantity and calculation processing time.SOLUTION: After acquiring inspection images including inspection object, plural hierarchy inspection images are generated by performing frequency conversion on the inspection image. Plural feature quantities corresponding to the type of a defect which may be included in the inspection object are extracted from at least one hierarchy inspection image in the plural hierarchy inspection images, the quality of the inspection image is determined based on the extracted feature quantity.SELECTED DRAWING: Figure 2 |
