| 发明名称 | Self-assembly of small structures | ||
| 摘要 | Small structures are formed by applying to a substrate a structural material and a layer of a sacrificial material having a lower surface energy than the structural material, to form an intermediate product. The substrate is then heated to a temperature at which the sacrificial material evaporates or sublimes and the structural material is mobilized. The sacrificial material is permitted to evaporate or sublime, an area of the substrate covered by the sacrificial material to diminish, and the structural material to agglomerate on the remaining sacrificial material to form a structure. | ||
| 申请公布号 | US9393590(B2) | 申请公布日期 | 2016.07.19 |
| 申请号 | US201313862579 | 申请日期 | 2013.04.15 |
| 申请人 | TEMPLE UNIVERSITY—OF THE COMMONWEALTH SYSTEM OF HIGHER EDUCATION | 发明人 | Neretina Svetlana;Hughes Robert Alan;Farzinpour Pouyan |
| 分类号 | B05D1/32;B82B3/00;B81C1/00;B82Y10/00;B82Y30/00;B82Y40/00;H01L29/66;H01L29/06;H01L29/16 | 主分类号 | B05D1/32 |
| 代理机构 | Drinker Biddle & Reath LLP | 代理人 | Drinker Biddle & Reath LLP |
| 主权项 | 1. A method of forming sub-micrometer structures, comprising: applying to a substrate a structural material and a layer of a sacrificial material; maintaining the substrate at a temperature at which the sacrificial material evaporates or sublimes and the structural material is mobilized; and permitting the sacrificial material to progressively evaporate or sublime, thereby diminishing a remaining area of the substrate covered by the sacrificial material; and permitting the structural material from parts of the area where the sacrificial material has evaporated or sublimed to agglomerate on the remaining sacrificial material to form a said structure. | ||
| 地址 | Philadelphia PA US | ||