| 摘要 |
PROBLEM TO BE SOLVED: To remove a liquid adhering to an outer surface of a liquid supply member, such as a nozzle, without scattering the liquid.SOLUTION: A substrate liquid processing apparatus includes: a substrate holding part (33) which holds a substrate to which liquid processing is performed; a liquid supply member (41) which supplies a liquid at a position above the substrate held by the substrate holding part; an electrification member (200) which generates electric charges; and a drive mechanism which moves the liquid supply member and the electrification member relative to each other at a position where the electric charges act on the liquid supply member.SELECTED DRAWING: Figure 2 |
