发明名称 ターゲット構造体及びそれを備える放射線発生装置
摘要 A radiation-transmissive type target structure includes a target layer formed on a substrate. The target layer has a thickness equal to or less than 20 mum, and is configured to generate radiation in response to irradiation of electrons. A surface of the target layer is formed with projecting portions and depressed portions, the depressed portions have a depth of at least half the thickness of the target layer. Advantageously, separation of the target layer at an interface between the substrate and the target layer is substantially prevented. A radiation generating apparatus and a radiography system equipped with the target structure are also disclosed.
申请公布号 JP5984403(B2) 申请公布日期 2016.09.06
申请号 JP20120018561 申请日期 2012.01.31
申请人 キヤノン株式会社 发明人 田村 美樹;佐藤 安栄;山▲崎▼ 康二
分类号 H01J35/08 主分类号 H01J35/08
代理机构 代理人
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