摘要 |
A radiation-transmissive type target structure includes a target layer formed on a substrate. The target layer has a thickness equal to or less than 20 mum, and is configured to generate radiation in response to irradiation of electrons. A surface of the target layer is formed with projecting portions and depressed portions, the depressed portions have a depth of at least half the thickness of the target layer. Advantageously, separation of the target layer at an interface between the substrate and the target layer is substantially prevented. A radiation generating apparatus and a radiography system equipped with the target structure are also disclosed. |