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发明名称
HANDOTAISOCHI
摘要
申请公布号
JPS5176971(A)
申请公布日期
1976.07.03
申请号
JP19740148646
申请日期
1974.12.27
申请人
HITACHI LTD
发明人
IKEZAWA RYUICHI;KIKUCHI SAKAE;KOBAYASHI SHIGETAKA;OOTANI NOBUO
分类号
H01L21/52;H01L23/12
主分类号
H01L21/52
代理机构
代理人
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