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经营范围
发明名称
RESIST COATER
摘要
申请公布号
JPS6396917(A)
申请公布日期
1988.04.27
申请号
JP19860241950
申请日期
1986.10.14
申请人
TOSHIBA CORP
发明人
IWASAKI HIDEO;NAKADA YUJI
分类号
B05C11/08;G03F7/16;H01L21/027;H01L21/30
主分类号
B05C11/08
代理机构
代理人
主权项
地址
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