发明名称 |
RESIST TREATING METHOD |
摘要 |
PURPOSE: A resist treating method is provided to rapidly clean double sides of an object to be processed and improve throughput by coping with various treating processes included in a photolithography process. CONSTITUTION: A carrier station(3) loads/unloads a carrier(2) in which the object to be processed is stored. A convey mechanism conveys an object taken out from the carrier station. At least one cleaning mechanism cleans the object, arranged along a convey path(6) on which the convey mechanism conveys the object. An object reversing mechanism(10) reveres the object, arranged along the convey path.
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申请公布号 |
KR100354547(B1) |
申请公布日期 |
2002.09.16 |
申请号 |
KR20000048569 |
申请日期 |
2000.08.22 |
申请人 |
OKYO ELECTRON KYUSHU LIMITED;TOKYO ELECTRON LIMITED |
发明人 |
MATSUKAWA HIROYUKI;YONEMIZU AKIRA;MATSUSHITA MICHIAKI;FUKUDA TAKAHIDE;FUJIMOTO AKIHIRO;TAKEKUMA TAKASHI;YAEGASHI HIDETAMI |
分类号 |
H01L21/304;B08B1/04;B08B3/04;B08B3/12;H01L21/00;H01L21/311;H01L21/677;(IPC1-7):H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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