ELECTRON BEAM-EXCITING ION SOURCE,申请号JP19870332169-传众专利搜索

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发明名称	ELECTRON BEAM-EXCITING ION SOURCE
摘要
申请公布号	JPH01176634(A)	申请公布日期	1989.07.13
申请号	JP19870332169	申请日期	1987.12.30
申请人	TOKYO ELECTRON LTD;RIKAGAKU KENKYUSHO	发明人	HARA TAMIO;HAMAGAKI MANABU;AOYANAGI KATSUNOBU;NANBA SUSUMU;KOSHIISHI AKIRA;MATSUDO MASAHIKO;KAWAMURA GOHEI;TAKAYAMA NAOKI
分类号	H01J27/20;H01J37/08	主分类号	H01J27/20
代理机构		代理人
主权项
地址

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