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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01308053(A)
申请公布日期
1989.12.12
申请号
JP19880139727
申请日期
1988.06.07
申请人
FUJITSU LTD
发明人
SUGAYA SHINJI
分类号
H01L23/522;H01L21/31;H01L21/768
主分类号
H01L23/522
代理机构
代理人
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