发明名称 WIRE BONDING APPARATUS
摘要 PURPOSE:To enable stabilized wire bonding and make easier the exchange work by preventing adhesion of dust to be deposited on a metal fine lead wound around a wire spool and contact by a worker during manipulation. CONSTITUTION:In a wire bonding apparatus for conducting the bonding using a metal fine lead 1 wound around a wire spool 2, a container 3 for storing the metal fine lead 1 and a wire spool 2 is comprised and the container 3 can be replaced under the condition as storing the metal fine lead and wire spool.
申请公布号 JPH0684994(A) 申请公布日期 1994.03.25
申请号 JP19920232444 申请日期 1992.08.31
申请人 NEC CORP 发明人 SATO HIDEAKI
分类号 H01L21/60 主分类号 H01L21/60
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