发明名称 Fluid storage and dispensing system featuring ex situ strain gauge pressure monitoring assembly
摘要 A fluid containment system including a vessel for containing a fluid that is discharged from the vessel in use or operation of the system. A pressure monitoring assembly including a strain-responsive sensor is disposed on an exterior wall surface of the vessel, to sense dynamic strain on the wall surface of such vessel that is incident to discharge of fluid from the vessel, and to responsively output a pressure-indicative response. Such arrangement is particularly useful in application to fluid storage and dispensing vessels containing interiorly disposed pressure regulator assemblies and holding liquefied gases or compressed gases, e.g., for use in semiconductor manufacturing operations.
申请公布号 US2002134794(A1) 申请公布日期 2002.09.26
申请号 US20010783919 申请日期 2001.02.15
申请人 ADVANCED TECHNOLOGY MATERIALS INC. 发明人 MCMANUS JAMES V.;WODJENSKI MICHAEL J.;JONES EDWARD E.
分类号 G01L9/04;B67D99/00;F17C13/02;G01L19/08;G01L19/12;(IPC1-7):B67D5/08 主分类号 G01L9/04
代理机构 代理人
主权项
地址
您可能感兴趣的专利