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经营范围
发明名称
SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPH08329873(A)
申请公布日期
1996.12.13
申请号
JP19950130019
申请日期
1995.05.29
申请人
HITACHI LTD
发明人
OUCHI YASUO;KUROSAKI TOSHISHIGE
分类号
H01J37/20;H01J37/28;(IPC1-7):H01J37/20
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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