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发明名称
摘要
申请公布号
JP2697199(B2)
申请公布日期
1998.01.14
申请号
JP19890290149
申请日期
1989.11.09
申请人
发明人
分类号
H01L21/225;H01L21/22;H01L21/322;H01L21/329;H01L29/167;H01L29/36;H01L29/861;(IPC1-7):H01L21/225
主分类号
H01L21/225
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代理人
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地址
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