| 摘要 |
PROBLEM TO BE SOLVED: To enable burning at low temperature and reducing cost by adding metallic oxide to the particulate monocrystal bodies of a ferroelectric material which has been previously grown to a prescribed particle diameter. SOLUTION: An electromechanical conversion element 1 is provided on a substrate 4, and electrodes 5 and 5 are arranged on both the upper and lower surfaces. Then, the displacements in contraction and expansion are generated by applying a voltage between the electrodes 5 and 5. The electromechanical conversion element 1 is burnt by adding metallic oxide 3 to the particulate monocrystal body 2 of a ferroelectric material which has been previously grown to the prescribed particle diameter and forming them to prescribed forms. Particulate monocrystal bodies 2 are formed into the prescribed particle diameter by press-forming raw materials of lead titanate zirconate, primarily sintering and grinding it, press-forming it, secondarily sintering and grinding it. The n-type metallic oxide semiconductors ZnO and TiO2 and the p-type metallic oxide semiconductors NiO and CoO, which can realize burning at the low temperature, are used as the metallic oxide 3. |
