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发明名称
摘要
申请公布号	JP2794401(B2)	申请公布日期	1998.09.03
申请号	JP19950209331	申请日期	1995.07.26
申请人	ERU JII SEMIKON CO LTD	发明人	YON GYU CHOI
分类号	H01L29/78;H01L21/336;(IPC1-7):H01L29/78	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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