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发明名称
N-Kanal-Klemmelement für einen ESD-Schutz bei der Herstellung eines selbstjustierenden, mit einem Silicid versehenen CMOS
摘要
申请公布号
DE69130030(D1)
申请公布日期
1998.10.01
申请号
DE1991630030
申请日期
1991.04.10
申请人
DIGITAL EQUIPMENT CORP., MAYNARD, MASS., US
发明人
MISTRY, KAIZAD RUMY, BRIGHTON, MASSACHUSETTS 02146, US
分类号
H01L27/04;H01L21/822;H01L21/8238;H01L27/02;H01L27/092;H01L29/45;(IPC1-7):H01L27/02;H01L21/768
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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