发明名称 Two-sided flattening apparatus
摘要 <p>A two-sided flattening apparatus configured to be able to continuously change the pressing force of an upper platen to the workpiece and thereby able to prevent damage to the workpiece at the time of contact and able to set the pressing force of the upper platen on the workpiece to a desired value, provided with a lower platen (1), an upper platen (2), and an elevator mechanism (3). A main elevator (6) of the elevator mechanism is formed by a cylinder (60), while a sub elevator (5) of the elevator mechanism is formed by air bags (70), hoses (71), and an air pump (72). The air bags (70) are connected to a connecting meter from the upper platen (2). By making the air bags (70) expand to make the piston rods (62) of the cylinders (60) contract, the upper platen (2) is made to descend to a position in close proximity to the workpiece (w). Suitably thereafter, the air bags (70) are made to contract to make the upper platen (2) softly contact the workpiece (w). The air bags (70) are made to further contract to make the pressing force of the upper platen (2) on the workpiece (w) continuously increase. <IMAGE></p>
申请公布号 EP0967048(A1) 申请公布日期 1999.12.29
申请号 EP19990110960 申请日期 1999.06.08
申请人 SPEEDFAM CO., LTD. 发明人 FURUSAWA, SHIRO;NAKAJYO, YOSHIHIRO
分类号 B24B47/14;B24B37/005;B24B49/16;H01L21/304;(IPC1-7):B24B37/04;B24B41/06 主分类号 B24B47/14
代理机构 代理人
主权项
地址