发明名称 VAPOR DEPOSITION DEVICE FOR PRODUCING RECORDING MEDIUM, AND CRUCIBLE FOR VAPOR DEPOSITION
摘要 PROBLEM TO BE SOLVED: To suppress the generation of a splush in a vapor deposited material stored in a crucible for vapor deposition at the time of film-forming a thin film magnetic layer on a recording medium such as a magnetic tape under a vacuum. SOLUTION: In the vapor deposition device for producing a recording medium provided with a vacuum tank 2 whose inside is held in a vacuum state, means 3 to 7 provided in the vacuum tank 2 and to be loaded with a stock 8a for a recording medium, a crucible 21 for vapor deposition set in the vacuum tank 2, and in which a bottomed storing part 21b storing a vapor deposited material 10 for forming a film on the stock 8a for a recording medium is formed on the side of the upper face 21a and an electron gun 11 fitted to the vacuum tank 2, emitting an electron beam 12 toward approximately the center part of the bottomed storing part 21b of the crucible 21 for vapor deposition, melting the vapor deposited material 10 in the bottomed storing part 21b and evaporating it to the side of the stock 8a for a recording medium, the approximately center part of the bottom face 21b1 in the bottomed storing part 21b of the crucible 21 for vapor deposition is projected compared to the peripheral bottom face to suppress the generation of a splush in the vapor deposited material 10.
申请公布号 JP2000045064(A) 申请公布日期 2000.02.15
申请号 JP19980210711 申请日期 1998.07.27
申请人 VICTOR CO OF JAPAN LTD 发明人 NISHIHARA TOSHIKAZU
分类号 C23C14/24;G11B5/85;(IPC1-7):C23C14/24 主分类号 C23C14/24
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