发明名称 Method of forming magnetic memory
摘要 A method of forming a magnetic memory, includes, forming a first magnetic film over a substrate, forming a second magnetic film on the first magnetic film, forming a conductive film on second magnetic film, and forming a resist pattern on the conductive film. Then, a first pattern is formed by etching the conductive film using the resist pattern as a mask and the resist pattern is removed. Then, a first magnetic substance layer is formed by etching the second magnetic film using the first pattern as a mask.
申请公布号 US2002146851(A1) 申请公布日期 2002.10.10
申请号 US20020116634 申请日期 2002.04.04
申请人 OKAZAWA TAKESHI;TSUJI KIYOTAKA 发明人 OKAZAWA TAKESHI;TSUJI KIYOTAKA
分类号 H01F10/16;H01F10/30;H01F41/18;H01L21/8246;H01L27/10;H01L27/105;H01L27/115;H01L27/22;H01L43/08;H01L43/12;(IPC1-7):H01L21/00;H01L21/824 主分类号 H01F10/16
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