ELECTRON BEAM IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To avoid hazardous effects of the electric field of an electromagnetic motor on the electron beam radiated to an original (irradiated object) for recording in an electron beam irradiation device and obtain high precision movement control of the beam in the radial direction on the original. SOLUTION: In an electron beam irradiation device of a partial vacuum system that vacuumizes a part on an original 1 to radiate the beam, the electromagnetic motor 9 to rotate the original 1 and the electromagnetic motor to move the original 1 radially are covered wholly with a magnetic enclosure 30 for magnetic shielding.