| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature measurement device capable of temperature measurement with high precision while measuring the temperature stably and correctly without polluting the atmosphere even in the case of measuring under the high temperature region, in the process of plasma generation atmosphere such as PVD, CVD, and dry etching. SOLUTION: The temperature measurement device is composed of a permanent magnet and a ferromagnetic alloy, wherein, the ferromagnetic alloy is so set that the Curie temperature of the alloy is the same as that of a measurement object. When the temperature of the alloy is lower than the objective temperature, the permanent magnet and the ferromagnetic alloy are stuck by the magnetic field, and when it reaches measurement objective temperature, the permanent magnet and the ferromagnetic alloy are separated, thereby it is constituted that the temperature reaching the objective temperature is displayed. COPYRIGHT: (C)2005,JPO&NCIPI
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