| 摘要 |
PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor capable of reducing parasitic capacitance of a wire connecting a detection circuit to a detection element for improving sensor precision. SOLUTION: A flexible beam arranged on a movable base board is fixed to a frame, and a weight is fixed in its center. When force such as acceleration is applied to the weight, an attitude of the weight is changed by action of the beam. A signal processing circuit detects the attitude change of the weight based on a change quantity of a capacitance between the weight and a fixed electrode. A signal processing circuit is built in the signal processing base board, on which the fixed electrode is arranged. In this way, an interval between the fixed electrode and the signal processing circuit can be reduced greatly, consequently, configuring an electrode contact short. By shorteningt the electrode contact, the parasitic capacitance can be lowered, and a C/V conversion rate in the signal processing circuit is improved, and consequently, sensor precision can be improved. COPYRIGHT: (C)2007,JPO&INPIT
|
