ORIGINAL PLATE AND METHOD OF MAKING FOR THE SAME AS WELL AS EXPOSURE METHOD USING THIS ORIGINAL PLATE

摘要

PROBLEM TO BE SOLVED: To provide a method of making original plates which is capable of reducing the manufacturing cost of a reticle manufactured by plural times of exposure stages. SOLUTION: The patterns of the reticle 2 are divided to dicing regions where the repetitive characteristic is low and regions of function elements A where the repetitive characteristic is high. The patterns of the dicing regions 4 are drawn to the original plates for the dicing regions and the patterns of the function elements A are drawn to the original plates 1-1 to 1-4 for the function elements A. The original plates 1-1 to 1-4 are respectively commonly used in plural times of exposure.