METHOD AND SYSTEM FOR DEFECT DETECTION

摘要

A method for detecting a defect is provided to detect a mismatch between a tested pixel and a reference pixel by comparing at lest one tested pixel with at least one reference pixel. A second pixel(2) of a second image(I2 22) is searched which corresponds to a test pixel of a first image(I1 21) of an object wherein the first and second images are acquired by using different methods. A third pixel of the second image is searched wherein the neighborhood(12) of the second pixel is similar to the neighborhood of the third pixel. A fourth pixel of the first image is searched which corresponds to the third pixel. The test pixel is compared with the fourth pixel. A sixth pixel of the second image is searched which corresponds to a fifth pixel of the first image. A seventh pixel of the first image is searched in which the neighborhood of the seventh pixel is similar to the neighborhood of the sixth pixel. Eight eighth pixels of the second image are searched which corresponds to the seventh pixel. The neighborhood of the fifth pixel is compared with the neighborhood of the eighth pixel.