发明名称 SPUTTERING TARGET AND METHOD FOR PRODUCING SINTERED OXIDE
摘要 Provided is a sputtering target for forming a transparent conductive film, which has low resistivity and excellent transparency, can be relatively easily patterned in amorphous state by weak acid etching and relatively easily crystallized. A method for manufacturing an oxide sintered body is also provided. The sputtering target is provided for forming the amorphous-state transparent conductive film. The sputtering target is provided with the oxide sintered body containing indium oxide, tin, if needed, and barium.
申请公布号 KR20080011650(A) 申请公布日期 2008.02.05
申请号 KR20077022245 申请日期 2007.04.02
申请人 MITSUI MINING & SMELTING CO., LTD. 发明人 TAKAHASHI SEIICHIRO;MIYASHITA NORIHIKO
分类号 C23C14/34 主分类号 C23C14/34
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