发明名称 Infrared ray detection device, method of fabricating the same and infrared ray camera
摘要 An infrared ray detection device has a detection cell which has a thermoelectric converting part and an infrared ray absorption layer formed via a space on a semiconductor substrate, a first wiring part formed on the semiconductor substrate, and a supporting part, the detection cell being formed via the space on the semiconductor substrate and supports the detection cell. The supporting part includes a plurality of supporting legs which have a second wiring part electrically connecting the first wiring part to the detection cell and an insulating part covering a surrounding are of the second wiring part, and at least one connection part made of an insulating material connecting the plurality of supporting legs to each other.
申请公布号 US7345278(B2) 申请公布日期 2008.03.18
申请号 US20060616660 申请日期 2006.12.27
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HONDA HIROTO;FUJIWARA IKUO;KUWATA MASAHIRO;MASUNISHI KEI
分类号 G01J5/00;H01L25/00 主分类号 G01J5/00
代理机构 代理人
主权项
地址