| 摘要 |
Molybdenum titanium sputter targets are provided. In one aspect, the targets are substantially free of the beta(Ti, Mo) alloy phase. In another aspect, the targets are substantially comprised of single phase beta(Ti, Mo) alloy. In both aspects, particulate emission during sputtering is reduced. Methods of preparing the targets, methods of bonding targets together to produce large area sputter targets, and films produced by the targets, are also provided. |
