THERMAL VACUUM CHAMBER APPARATUS

摘要

An apparatus for forming a thermal vacuum chamber is provided to make a chamber formed by a vacuum container and a door into a vacuum condition effectively by installing a rubber plate respectively on the vacuum container and the door. An apparatus for forming a thermal vacuum chamber comprises a vacuum container(11), a door(13), a thermal control system, a first rubber plate(25), a second rubber plate(27), and a vacuum pump. A chamber(15) is formed inside the vacuum container. The vacuum container includes a first flange(17) having a first contact face(19). A door closes and opens the chamber, and includes a second flange(21) having a second contact surface(23). The thermal control system cools the chamber. The first rubber plate is fixed to a circumference of the first flange. The vacuum pump discharges gas within the closed chamber. The first and the second rubber plates have a sealed space between the circumferences of the first flange and the second flange.