发明名称 SURFACE CORRECTION ON COATED REFLECTIVE OPTICAL ELEMENTS
摘要 The invention relates to a method for correcting a surface shape of a reflective optical element (1) which has a substrate (2) and a reflective coating (3), wherein the method comprises at least the following step: correcting the surface shape (5) by generating a permanent local shape variation (10) in at least one deformable layer (7) which is arranged between the substrate (2) and the reflective coating (3), and which has a magnetic shape memory alloy, wherein the permanent local shape variation (10) is generated by applying an electromagnetic field, in particular a magnetic field (9), to the at least one deformable layer (7). The invention also relates to a reflective optical element (1) comprising a substrate (2), a reflective coating (3), and at least one deformable layer (7) arranged between the substrate (2) and the reflective coating (3), and having a magnetic shape memory alloy.
申请公布号 WO2016087092(A1) 申请公布日期 2016.06.09
申请号 WO2015EP73153 申请日期 2015.10.07
申请人 CARL ZEISS SMT GMBH 发明人 STICKEL, FRANZ-JOSEF
分类号 G03F7/20;G02B5/08;G02B27/00 主分类号 G03F7/20
代理机构 代理人
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