发明名称 INSPECTION DEVICE, DRAWING APPARATUS AND INSPECTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a technique for inspecting a light modulation element using a unique period of a movable ribbon.SOLUTION: A light amount acquisition part 911 acquires a light amount which is measured by a light amount detector 35 after voltage is applied to a specific light modulation element 32, the light amount is a light amount in a period (N.T1) obtained by multiplying a natural number and a unique period T1 of a movable ribbon 321a (step S11). Then, an average value acquisition part 913 acquires an average value of the light amounts acquired by the light amount acquisition part 911 (step S12). The average value is regarded as a light amount corresponding to the voltage applied, about the specific light modulation element 32. The light amount value corresponding to each voltage, is determined, thereby IV characteristic information indicating a relationship between voltage and a light amount, about the light modulation element 32 which is an inspection object, is acquired.SELECTED DRAWING: Figure 7
申请公布号 JP2016118578(A) 申请公布日期 2016.06.30
申请号 JP20140256273 申请日期 2014.12.18
申请人 SCREEN HOLDINGS CO LTD 发明人 HAYASHI YUKIKO;KITA TAIGA;MATSUO KIYOTAKA
分类号 G03F7/20;G02B5/18;H01L21/027 主分类号 G03F7/20
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