| 摘要 |
A dielectric layer (33) is formed on the top surface of a fixed electrode (32). By causing the top surface of the dielectric layer (33) to recede downwards, a recess (33a) is formed in the top surface of the dielectric layer (33). An upper substrate (35a) is layered on the top surface of the dielectric layer (33) so as to cover the recess (33a). From a part of the upper substrate (35a), specifically a region positioned above the recess (33a), a conductive diaphragm (35) having a thin film shape is formed. In the region of the dielectric layer (33) opposite of the diaphragm (35), the ratio of where the dielectric layer is present on the circular perimeter centered on said opposite region varies according to the distance from the center of the opposite region. |
