POLISHING METHOD OF DIAMOND SURFACE AND DEVICE PERFORMING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a polishing method which provides uniform polishing without being influenced by a shape of an object to be polished and crystal size of diamond by solving problems causing polishing irregularities and substrate exposure, in the method of polishing the surface of the object to be polished of the diamond surface with a polishing member containing metal or metal oxide.SOLUTION: A diamond surface polishing method includes at least a step of bringing a long size shaped polishing member having a linear or belt-like shape which contains metal or metal oxide into sliding contact with an object to be polished of which the surface is made of diamond to perform polishing. Therein, a pushing pressure of the polishing member is controlled such that a contacting surface pressure on a working area gets uniform in accordance with material of the polishing member on a sliding part and/or a shape of the object to be polished and crystal size of diamond.SELECTED DRAWING: Figure 5