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发明名称
VERFAHREN ZUM STRUKTURIEREN VON MOLYBDAEN-SCHICHTEN
摘要
申请公布号
DD159386(A1)
申请公布日期
1983.03.02
申请号
DD19810230437
申请日期
1981.06.01
申请人
BLUM,SABINE,DD;BERTZ,ANDREAS,DD
发明人
BLUM,SABINE,DD;BERTZ,ANDREAS,DD
分类号
C23F4/00;(IPC1-7):H01L21/308
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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