| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a silicon carbide fine powder, by which the silicon carbide fine powder having a uniform particle size, especially the silicon carbide fine powder having an average particle size of <=1 μm can be easily produced. SOLUTION: This method for producing the silicon carbide fine powder includes a mixing process for obtaining a mixed powder by mixing a silicon powder comprising a silicon particles containing oxygen in an amount of >=0.2 mass % and a carbon powder and a heating process for synthesizing the silicon carbide fine powder by heating the mixed powder. The reaction at a temperature not higher than the melting point of silicon at the heating process is suppressed sufficiently by the oxygen contained in the silicon particles, especially an oxide film on the surface of each particle. Thereby, it becomes possible to carry out a liquid phase reaction of silicon and carbon sufficiently at a temperature not lower than the melting point of silicon. Accordingly, a silicon carbide fine powder having a uniform particle size, e.g. a silicon carbide fine powder having an average particle size of <=1 μm can be synthesized. |
