| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface potential detector capable of accurately detecting the potential of an object to be measured even when the distance between the detector and the object is fluctuated. SOLUTION: A potential detecting electrode 11 outputs a potential distance signal s1 including a distance component corresponding to the distance to the object 40 to be measured and a potential component corresponding to the potential of the object 40. A distance detecting electrode 12 outputs a distance signal s2 corresponding to the distance to the object 40. The voltage distance signal s1 and the distance signal s2 are inputted to a signal processing circuit 20 that removes the distance component from the potential distance signal s1 and generates a signal s3 corresponding to the potential of the object 40. |
