| 摘要 |
PURPOSE:To provide extension of a discharge in a discharge tube even if an input power is varied and to improve an oscillation efficiency by forming an electrode of a flat platelike electrode, and increasing a gap between at least one electrode and the tube from the upstream side of laser gas toward a downstream direction. CONSTITUTION:Paired electrodes 22, 23 provided above and below a discharge tube 1 are formed of flat platelike electrodes. At least one, e.g. the electrode 22 is so inclined as to increase a gap to the tube 1 with respect to the downstream direction of laser gas, and a dielectric 24 is inserted therebetween. |
