| 摘要 |
PURPOSE:To suppress consumption of laser gas by mounting a gas reservoir at a laser vessel side of an optical window replacing valve, and partitioning the reservoir into partition chambers. CONSTITUTION:A cylindrical gas reservoir 12 in which a laser light 7 can be passed is disposed coaxially with the propagating direction of the light 7. The reservoir 12 is partitioned therein by a partition wall composed to cross the propagating direction of the light 7 and to pass the light 7. Here, laser gas is forcibly circulated in a laser vessel 1. Thus, since reactive particles generated upon oscillation are floated together with the laser gas, the particles act as a resistor against the winding in a direction of a gate valve 10 due to vortex, etc., to sink the particles in the partition chamber and to prevent electrophoresis of the particles to the vicinity of the valve 10. Thus, the closing operation of the valve can be effectively performed to suppress consumption of expensive laser gas and to replace an optical window. |
