| 摘要 |
PURPOSE:To detect the amount of misalignment with high accuracy by setting each element so as to become betal/betah >= 10, when misalignment detecting magnification and interval shift detecting magnification are denoted as betal and lh, respectively, at the time of executing relative positioning of a first and a second objects. CONSTITUTION:A luminous flux from the light source 13 is made incident on alignment marks 5, 6 of an object 1 through a collimator lens system 14 and a half mirror 15, and a diffracted light from alignment marks 3, 4 of an object 2 is photodetected by detecting parts 11, 12, and a position of an incident luminous flux is detected. In this case, at the time of executing relative positioning of the objects 1, 2, when a ratio (misalignment detecting magnification) to a fluctuation amount of an incident position of the luminous flux onto the prescribed surface to a relative misalignment amount of the objects 1, 2, and a ratio (interval shift detecting magnification) to the fluctuation amount of the incident position of the luminous flux onto the prescribed surface to an interval fluctuation amount of the objects 1, 2 are denoted betal and betah, respectively, marks 3 - 6 are set so as to becomes betal/betah >= 10. In such a way, the amount of misalignment can be detected with high accuracy. |
