| 摘要 |
PURPOSE:To prevent generation of cracks by using rare earth phosphate as P source. CONSTITUTION:Metal oxide such as SiO2 comprising one or more elements selected from group IV such as Si, Ge, Sn, Pb, Ti, Zr, and Hf, rare earth oxide such as Er2O3 comprising one or more elements selected from Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu, and rare earth phosphate such as NdPO4, ErPO4, etc., are weighed to specified amt. of each and mixed. To this mixture, a small amt. of water is added to make a slurry, which is then dried, pulverized and granulated to obtain about 500mum average particle diameter. This mixture powder is supplied in a due, pressed under 150-2000kg/cm<2> pressure and sintered at 1000-1400 deg.C to obtain a high-quality metal oxide sintered body free from cracks. |
