发明名称 |
Fast scanning electron microscope (FSEM) |
摘要 |
High magnification and large depth of field with a temporal resolution of less than 100 microseconds are possible using the present invention which combines a linear electron beam produced by a tungsten filament from an SX-40A Scanning Electron Microscope (SEM), a magnetic deflection coil with lower inductance resulting from reducing the number of turns of the saddle-coil wires, while increasing the diameter of the wires, a fast scintillator, photomultiplier tube, photomultiplier tube base, and signal amplifiers and a high speed data acquisition system which allows for a scan rate of 381 frames per second and 256x128 pixel density in the SEM image at a data acquisition rate of 25 MHz. The data acquisition and scan position are fully coordinated. A digitizer and a digital waveform generator which generates the sweep signals to the scan coils run off the same clock to acquire the signal in real-time.
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申请公布号 |
US5254857(A) |
申请公布日期 |
1993.10.19 |
申请号 |
US19920963038 |
申请日期 |
1992.10.19 |
申请人 |
KACHINA TECHNOLOGIES, INC. |
发明人 |
ROSS, TIMOTHY J.;WANG, MING L.;MACKINNON, IAN D. R. |
分类号 |
G01N3/00;G01N3/02;G01N3/30;H01J37/28;(IPC1-7):H01J37/28 |
主分类号 |
G01N3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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