GAS DEPOSITION METHOD AND DEVICE THEREFOR,申请号JP19970331316-传众专利搜索

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发明名称	GAS DEPOSITION METHOD AND DEVICE THEREFOR
摘要
申请公布号	JPH11152582(A)	申请公布日期	1999.06.08
申请号	JP19970331316	申请日期	1997.11.14
申请人	VACUUM METALLURGICAL CO LTD	发明人	FUCHIDA HIDETSUGU
分类号	C23C24/04;(IPC1-7):C23C24/04	主分类号	C23C24/04
代理机构		代理人
主权项
地址

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