| 发明名称 |
MICROLENS FORMATION THROUGH FOCAL PLANE CONTROL OF AN AERIAL IMAGE |
| 摘要 |
A method and apparatus for forming microlenses involves defocusing light passing through a mask (112) from a source (104) during semiconductor processing to control the curvature of microlenses being formed.
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| 申请公布号 |
WO9950052(A1) |
申请公布日期 |
1999.10.07 |
| 申请号 |
WO1999US05926 |
申请日期 |
1999.03.17 |
| 申请人 |
INTEL CORPORATION;WESTER, NEIL |
发明人 |
WESTER, NEIL |
| 分类号 |
B29D11/00;G02B3/00;(IPC1-7):B29D11/00 |
主分类号 |
B29D11/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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