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发明名称
Composition and Method for Polishing a Composite Comprising Titanium
摘要
申请公布号
KR20000076305(A)
申请公布日期
2000.12.26
申请号
KR19997008406
申请日期
1999.09.16
申请人
发明人
分类号
C09G1/02;C09K3/14;C23F3/00;H01L21/304;H01L21/321
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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