| 摘要 |
<p>PURPOSE:To provide a fixing device which can fix a photomask without lowering its plane accuracy, which is provided with a high-accuracy definite-position property in a direction perpendicular to the plane direction of the photomask and whose treatment capability can be enhanced. CONSTITUTION:The thin-sheet fixing device is provided with a frame 11, with a criterion piece 14 which is installed at the frame 11 and which supports a photomask 12, with a plate spring 17 one end of which is attached to the frame 11, whose rigidity is high in the plane direction of the photomask 12 and whose rigidity is low in a direction perpendicular to the plane direction and with a suction pocket 16 which is attached to the other end of the plate spring 17 and which fixes the photomask 12.</p> |
